The following SEMI standards (and others) have been implemented where applicable in the RI7100A and CASSINI systems.
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SEMI S2-0709 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
This safety guideline was technically approved by the global Environmental Health and Safety Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009 and on CD-ROM in July 2009. Originally published in 1991; previously published July 2006.
This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.
Applicability — This guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.
SEMI E122-0703 - Standard for Tester Equipment Specific Equipment Model (TSEM)
This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee on November 22, 2002. Initially available at www.semi.org January 2003; to be published March 2003.
This document establishes a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment. These characteristics and behaviors are required to be implemented. The intent of this document is to facilitate the integration of testing equipment into an automated semiconductor factory.
This document accomplishes this by defining an operational model for testing equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior. The document defines the view of the equipment through the host communications link but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class. This document expands testing equipment requirements and capabilities in the areas of the processing state model, collection events, alarm documentation, remote commands, variable items, and process program management.
Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)
This document maps the services and data of SEMI E122 to SECS-II streams and functions, and data definitions. This is a specification covering equipment supporting automated control job management. This document applies to all implementations of SEMI E122 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E122 and SEMI E5.